Abstract

Guided-wave optical devices generally consist of complex planar structures with extremely small dimensions. Typically, the components of these structures must be placed relative to one another with a precision even finer than minimum lateral dimensions. Components frequently include periodic and quasi-periodic gratings, and several layers. Also, high demands are placed on the quality of the materials used. For these reasons, guided-wave optical devices present formidable challenges for microstructure fabrication technology.

© 1980 Optical Society of America