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Fabrication of Submicrometer Period Gratings with Precisely Defined Profiles for Integrated Optics Applications*

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Abstract

Several integrated optics devices require precisely defined gratings with submicrometer periodicities. These include distributed feedback lasers, filters, resonators, input-output couplers, etc. Two recently developed techniques [1,2] for fabricating grating structures will be described together with the application of these techniques in the field of integrated optics.

© 1980 Optical Society of America

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