Abstract

Existing techniques for fabricating grating-couplers for thin-film optical waveguides apply mostly to surface gratings. By comparison, optical grating-couplers implanted inside waveguides by ion bombardment will lead to much smaller perturbations on the surfaces and interfaces of the optical waveguide. This will have device implications. It is, therefore, important to evaluate this technique for fabricating grating couplers as well as other optical components. In this talk, we report on the successful fabrication of optical grating-couplers (for a schematic, see Fig.1) and one- and two-dimensional waveguide structures (Figure 2) in glass waveguides by ion implantation.

© 1982 Optical Society of America