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Electron-beam microfabrication of optical gratings on polydiacetylene

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Abstract

There has been an increasing interest in polydiacetylenes as nonlinear waveguide materials. Although a number of crystal growth techniques can be used to process the polydiacetylene polymers into a planar waveguide form (e.g., the Langmuir-Blodgett multilayer deposition technique and shear growth technique1), there is a lack of fabrication methods to create optical components in these guides. We report the successful fabrication of optical grating structures by direct electron-beam writing on the polymer. The technique can also be used for microfabrication of other integrated optics components, e.g., channel waveguides.

© 1986 Optical Society of America

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