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Integrated Four-Channel Mach-Zehnder Multiplexer Fabricated With Phosphorous Doped SiO2 Waveguides on Si

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Abstract

Wavelength division multiplexing of optical signals is an efficient means to increase the information density per fiber. The purpose of this paper is to demonstrate and evaluate a multiplexer that is an optical integrated circuit, capable of mass production by conventional Si IC-processing. Here, we present a 4 channel multi/demultiplexer based on Mach-Zehnder interferometers, which has negligible reflections and low excess loss. The device is made from single mode channel waveguides of P-doped SiO2 on Si, which have a very low (0.05 dB/cm) waveguide loss for λ = 1.5 μm.

© 1988 Optical Society of America

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