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Conferences > IPNRA > 2009 > JTuB > JTuB4

Filling of Slot Waveguides with Versatile Material Systems Using Atomic Layer Deposition

Tapani Alasaarela, Antti Säynätjoki, Petri Stenberg, Markku Kuittinen, and Seppo Honkanen

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Abstract

We introduce Atomic Layer Deposition (ALD) for versatile filling of slot waveguides. We demonstrate filling of test structures with combination of TiO2 and Al2O3 layers and calculate the properties of dual-material filled slot waveguides.

© 2009 Optical Society of America

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