Abstract

We report on the fabrication and characterization of integrated-optics multiplexer/demultiplexers (muldex) on GaInAsP/InP suitable for fiber-optic bidirectional B-ISDN customer access connections. The broadband and narrow bandwidth muldex structures were designed by two-dimensional finite-difference calculations (FDM) and the beam-propagation method (BPM). Both structures are realized in rib-waveguide technology, using quaternary LPE-grown layers (equivalent bandgap λ_Q = 0.97 µm and λ_Q = 1.06 µm). Waveguides are structured by RIE etching, and rib heights are controlled by in situ ellipsometry.¹ The typical width of the waveguides and of the coupler gaps are 2-3 µm.

© 1990 Optical Society of America