Abstract

The fabrication of integrated-optical devices (IOCs) requires, in the same way as in microelectronics, the cycle layout/simulation/manufacturing test. To avoid the production of a large series of IOC test structures, computer-aided technology (CAT) layout techniques are required. Because of the complex geometry of IOCs, even basic elements must be designed numerically; simple placement techniques of rectangular areas, as in microelectronics, are not sufficient. Basic requirements for IOC layout are, e.g., a variable length/width scaling, the inclusion of technological parameters as attributes, the verification of design rules and data interfaces to simulation programs. Various techniques for the numerical simulation and modeling of IOCs already exist¹ as well as dedicated IOC layout editors.²

© 1990 Optical Society of America