Abstract

Switching voltages of NLO-polymer based electro-optic modulators competitive with devices in conventional materials have been reported by several groups.^1-6. We have fabricated and tested polymer based Mach-Zehnder modulators fabricated with mode sizes dose to those of 1.3 μm optical fiber. These devices were fabricated using reactive-ion etching to form buried rib structures. Initial testing has shown no photo-induced damage to the waveguides illuminated with either 15 mW of 1.3 μm or 0.4 mW of 830 nm light The measured half wave voltage is below 10 V.

© 1991 Optical Society of America