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Structural phase diagrams of proton exchanged waveguides on Z-, X- and Y-cuts of LiNbO3

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Abstract

The proton-exchange (PE) technique1 has been of considerable interest recently for the fabrication of integrated optics devices in lithium niobate and lithium tantalate. During the past ten years, a lot of attempts have been made to characterize the PE process in LiNbO3. However, in the known reports, severa1 fundamental issues, have not been addressed, the published structural investigations of PE LiNbO3 waveguides being uncompleted and restricted to particular fabrication process.

© 1996 Optical Society of America

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