Abstract
Laser processing at micrometer and sub-micrometer resolutions is becoming more prominent, driving the equipment used for these processes to meet more demanding specifications. Two-photon polymerization (2PP), selective laser etching of glass and laser micro-machining are emerging processes that fall into this category. They rely on ultrafast lasers in the femtosecond pulse width range that are focused with high numerical aperture focusing optics to achieve sub-micrometer spot size. The small spot size enables impressive processing resolution, but it also creates real challenges for positioning such a small beam and allowing that beam to make large enough parts for practical applications.
© 2023 The Author(s)
PDF Article | Presentation VideoMore Like This
Qianyi Zhang, Antoine Boniface, Virendra Kumar Parashar, and Christophe Moser
cm_11_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023
Franziska Chalupa-Gantner, Thomas Koch, Jakob Puchhammer, Markus Lunzer, and Aleksandr Ovsianikov
cm_p_17 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023
Egidijus Vanagas, Jouji Kawai, Dmitri Tuzhilin, Hirofumi Musasa, Pavel Rutkovski, Igor Kudryashov, and Shoji Suruga
ME5 International Conference on Ultrafast Phenomena (UP) 2004