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Conferences > OAE > 1987 > ThA > ThA4

Auger Analysis of Elemental Depth Profiles Correlated with Multi-Pulse Laser Damage of GaAs Surfaces

Dhiraj K. Sardar, Michael F. Becker, and Rodger M. Walser

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Abstract

A great deal of effort has been made in recent years to understand the mechanisms of laser induced damage in solids. Semiconductors, in particular, are of interest both becuase of fundamental questions concerning their damage processes for which they are model systems, and because of their technological importance.

© 1987 Optical Society of America

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