Practical interferometric scanning optical microscope

P. C. D. Hobbs; Gordon S. Kino

doi:10.1364/OAM.1985.TUO2

Annual Meeting Optical Society of America
Technical Digest Series (Optica Publishing Group, 1985),
paper TUO2
•https://doi.org/10.1364/OAM.1985.TUO2

Practical interferometric scanning optical microscope

P. C. D. Hobbs and Gordon S. Kino

OSA Annual Meeting 1985

Washington, D.C. United States
14–18 October 1985
ISBN:

From the session
Symposium on Scanning Laser Microscopes (TUO)

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P. C. D. Hobbs and G. S. Kino, "Practical interferometric scanning optical microscope," in Annual Meeting Optical Society of America, Technical Digest Series (Optica Publishing Group, 1985), paper TUO2.

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Abstract

A new type of electronically scanned optical microscope using a Bragg cell is described. It is well suited to the measurement of linewidths and step heights.

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