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Conferences > OAM > 1987 > WG > WG7

Improvement of a noninvasive optical probe

Zhizhi Xu

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Abstract

In recent years, a noninvasive optical probe was developed for some integrated circuits.1,2 it has been improved by using a multilongitudinal-mode 1,3-μm laser diode and a Wollaston prism for probing a Si integrated circuit.3

© 1987 Optical Society of America

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