Abstract

Potential multilayer grating applications for the wavelength region from 6 to 350 Å are discussed. Multilayer bandwidth and efficiency as affected by stack construction as well as the effects of roughness and corrections to Bragg’s law are considered. Grating performance is reviewed with attention to the limitations to high resolving powers and spectral purity in fabrication and instrument design. Combined multilayer grating performance is discussed for broadband and narrowband coatings. Designs for 10-20 Å, 10⁵ resolving power spectrograph, 6-60-Å scanning monochromator, and a 170- or 45-Å region, medium resolution, broadband spectrograph/monochromator are explored.

© 1988 Optical Society of America