Abstract

Several optical coatings were produced by ion assisted deposition (IAD) and their mechanical properties were investigated using four different methods. The experimental results are summarized here:

(1) Eleven kinds of film were produced by IAD; they are a seventeen-layer dielectric interference filter of ZnS/MgF₂; an antireflection coating of MgF₂ on a plastic substrate, some oxide films such as ZrO₂, TiO₂, and SiO₂; some metallic films such as Ag, Al, and Cu; some metal bandpass films for energy efficiency.

(2) Compared with those deposited by PVD, all the films by IAD with proper parameters have better mechanical properties, with increased abrasion and corrosion resistance, as well as improved adhesion and security.

(3) SEM photographs showed that IAD had effectively reduced the affected width of scratches on the film surface. This means that the mechanical properties and hardness of the films have been improved.

(4) With the IAD technique, we can obtain firm and fine films on plastic substrate without heating and it is difficult to obtain them by the PVD technique.

(5) The XRD, TEM, and TPDS analyses showed that the reason for improving mechanical properties by IAD is that bombardment particles can increase collecting density, improve microstructure, and facilitate crystallization of coating; and for some films, bombardment with different ions has different effects on the properties of films.

© 1989 Optical Society of America