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Soft-x-ray optics

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Abstract

This tutorial will serve as an introduction to the papers in the symposia on soft x-rays. We will explain the basic physics of imaging and dispersing devices (zone plates, multilayer structures, gratings) for x-rays in an intuitive way. Fabrication tolerances and methods together with the required metrology for the highest performance and the present state of the art will be discussed. An overview of the present and anticipated future applications will be given.

© 1990 Optical Society of America

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