Multilayers for Soft-X-Ray Optics

Takeshi Namioka; Masato Koike

doi:10.1364/SXRAY.1991.ThB1

Soft-X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1991),
paper ThB1
•https://doi.org/10.1364/SXRAY.1991.ThB1

Multilayers for Soft-X-Ray Optics

Takeshi Namioka and Masato Koike

Soft X-Ray Projection Lithography 1991

Monterey, California United States
10–12 April 1991
ISBN:

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Multilayer Optics II (ThB)

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T. Namioka and M. Koike, "Multilayers for Soft-X-Ray Optics," in Soft-X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1991), paper ThB1.

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Abstract

Soft-x-ray (SXR) multilayers havé been successfully applied to various optical elements and systems, and their technology seems to have been nearly perfected. However, many problems fundamental to multilayers have to be solved for further development. This paper presents results of our studies on some of these problems.

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