Abstract

One of the techniques used to make smart spatial light modulators (S-SLM) involves the deposition of a thin film of electrooptic lead lanthanum zirconate titanate (PLZT) on silicon-on-sapphire substrate next to silicon circuits. By fabricating silicon devices prior to deposition of PLZT films, VLSI circuits of any complexity can be achieved and linked to PLZT modulators on the same sub-strate. The amount of light modulation that can be achieved through thin PLZT fdms can be dramatically improved by placing the film in a Fabry-Perot interferometer. The interferometer would also offer attractive features such as high speeds (due to low intrinsic capacitance) and low switching energies. The first step in the development of Fabry-Perot interferometers involves the deposition of PLZT films on a reflective layer such as highly oriented thin platinum films grown on silicon or sapphire substrates. A final step in the process would be the deposition of a top layer of a mirror stack.

© 1991 Optical Society of America