Bonding of Si thin films to PLZT Substrates for Smart Spatial Light Modulator Applications

M.S. Jin; J. H. Wang; V. H. Ozguz; S. H. Lee

doi:10.1364/SLMA.1993.STuB.2

Spatial Light Modulators and Applications
Technical Digest Series (Optica Publishing Group, 1993),
paper STuB.2
•https://doi.org/10.1364/SLMA.1993.STuB.2

Bonding of Si thin films to PLZT Substrates for Smart Spatial Light Modulator Applications

M.S. Jin, J. H. Wang, V. H. Ozguz, and S. H. Lee

Spatial Light Modulators and Applications 1993

California United States
15–17 March 1993
ISBN:

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Silicon-Addressed Hybrid SLMs (STuB)

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M. S. Jin, J. H. Wang, V. H. Ozguz, and S. H. Lee, "Bonding of Si thin films to PLZT Substrates for Smart Spatial Light Modulator Applications," in Spatial Light Modulators and Applications, Technical Digest Series (Optica Publishing Group, 1993), paper STuB.2.

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Abstract

In order to realize smart spatial light modulators (S-SLMs), electronic processing materials (e.g. Si, GaAs) and light modulation materials (e.g. Ferroelectric ceramics or liquid crystals, III-V semiconductors, Si) need to be combined.

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