Non-Contact Precision Surface Measurements

Steven R. Lange

doi:10.1364/OFT.1984.WDA2

Workshop on Optical Fabrication and Testing
(Optica Publishing Group, 1984),
paper WDA2
•https://doi.org/10.1364/OFT.1984.WDA2

Non-Contact Precision Surface Measurements

Steven R. Lange

Optical Fabrication and Testing 1984

Monterey, California United States
18–20 April 1984
ISBN:

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Optical Metrology (WDA)

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S. R. Lange, "Non-Contact Precision Surface Measurements," in Workshop on Optical Fabrication and Testing, (Optica Publishing Group, 1984), paper WDA2.

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Abstract

An instrument capable of making precision surface measurements, including RMS roughenss, autocovariance and power spectrum, in a non-contact mannner is described with measurements presented on super-polished optical glass and diamond turned samples.

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