Abstract

A novel surface slope measuring interferometer, the heterodyne pencil beam interferometer (HPBI), has been designed, fabricated and is being tested. The HPBI was designed to measure a wide variety of optics including concave and convex aspheres as well as optics with non-circular shapes. The HPBI system presented is a scalcable design ultimately capable of measuring optical surfaces several meters in diameter. A detailed mechanical and optical analysis and tradeoff study was performed to ensure the high performance of the HPBI. An algorithm was developed to convert slope data to a surface profile contour map. Details of these features will be discussed. Sample output from typical measurements will be presented.

© 1987 Optical Society of America