Abstract

Fresnel zone plates and phase plates were fabricated and tested with copper K-alpha X- rays (8 Kev, λ = 1.54 Å). Alternating layers of transparent and opaque materials are sputtered onto two substrates, sliced with a diamond or wire saw perpendicular to the coating, ground to a thin slab (~100 μm thick), and polished. The thin slabs are mounted in an X-ray test bed, illuminated with X-rays and scanned in the image plane with a detector and a moveable slit. The fabrication procedures and test results will be discussed.

© 1990 Optical Society of America