Abstract

Schwarzschild microscopes have been designed, fabricated, and tested. The distance from an object to film is 1500 mm with a magnification of 15 and f/3.6. These values were optimized with use of ray-tracing program. W/B₄C, Ni/C, and Mo/Si multilayered mirrors were used for λ = 42, 73, 160 Å, respectively. The surface roughness of fused silica substrate is from 1 to 3 Å. The resolution test was conducted by using a test mesh backlit with laser produced gold X rays as an object to obtain the images on a Kodak 101–07 film. Results indicate 0.5 μm resolution. A zooming tube with a Csl photo cathode was also tested as a high spatial resolution detector. The resolution on the photocathode is less than 1 μm, corresponding to 0.1 μm resolution for a system with a magnification of 10.

© 1992 Optical Society of America