A Model of Roughness Evolution for Ion Beam Milling of Metallic Thin Films

C.M. Egert; K.A. Thomas

doi:10.1364/OFT.1994.OThB4

Optical Fabrication and Testing Workshop
Technical Digest Series (Optica Publishing Group, 1994),
paper OThB4
•https://doi.org/10.1364/OFT.1994.OThB4

A Model of Roughness Evolution for Ion Beam Milling of Metallic Thin Films

C.M. Egert and K.A. Thomas

Optical Fabrication and Testing 1994

Rochester, New York United States
6–9 June 1994
ISBN:

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Ion Milling (OThB)

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C. M. Egert and K. A. Thomas, "A Model of Roughness Evolution for Ion Beam Milling of Metallic Thin Films," in Optical Fabrication and Testing Workshop, Technical Digest Series (Optica Publishing Group, 1994), paper OThB4.

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Abstract

A predictive model of roughness evolution during ion milling of metallic overcaots and the application of this model to optical fabrication will be presented.

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