Abstract

For application to soft x-ray multilayers we have so far determined optical constants of thin-film materials in the soft x-ray region using reflectance measurements.^1-3 The optical constants are determined by least-squares fitting analysis for the reflectance vs angle-of-incidence curves. The Fresnel reflection coefficients are corrected with the so-called Debye-Waller factor, where only the rms surface roughness is included as a parameter characteristic to the sample surface. From the curve-fitting analysis we obtain rms surface roughnesses as well as the optical constants.

© 1994 Optical Society of America