Metrology of Large, Freeform Optics with At-Focus Scanning Ptychography

Bojana Ivanic; Sourangsu Banerji; David Goldberger; Jonathan Barolak; Jeremy Goeckeritz; Daniel E. Adams

Optica Design and Fabrication Congress 2023 (IODC, OFT)
Technical Digest Series (Optica Publishing Group, 2023),
paper OW3B.6

Metrology of Large, Freeform Optics with At-Focus Scanning Ptychography

Bojana Ivanic, Sourangsu Banerji, David Goldberger, Jonathan Barolak, Jeremy Goeckeritz, and Daniel E. Adams

Optical Fabrication and Testing 2023

Québec City, Québec Canada
4–8 June 2023
ISBN: 978-1-957171-22-7

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Advanced Metrology Systems II (OW3B)

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B. Ivanic, S. Banerji, D. Goldberger, J. Barolak, J. Goeckeritz, and D. E. Adams, "Metrology of Large, Freeform Optics with At-Focus Scanning Ptychography," in Optica Design and Fabrication Congress 2023 (IODC, OFT), Technical Digest Series (Optica Publishing Group, 2023), paper OW3B.6.

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Abstract

We present a new ptychographic metrology for high-precision characterization of large, freeform optical components without use of null optics, corroborated by preliminary data and simulations that verify the efficacy of our system.

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