The Antiscattering of Multilayer Antireflection Coatings

Cheng-Chung Lee; Pei-Hung Yeh

doi:10.1364/OIC.1988.PDP6

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper PDP6
•https://doi.org/10.1364/OIC.1988.PDP6

The Antiscattering of Multilayer Antireflection Coatings

Cheng-Chung Lee and Pei-Hung Yeh

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
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C. Lee and P. Yeh, "The Antiscattering of Multilayer Antireflection Coatings," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper PDP6.

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Abstract

It is possible to have antiscattering coatings if the air-film interface roughness correlates with the film-substrate interface roughness.

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