Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Simultaneous Determination of Refractive Index, Its Dispersion and Depth Profile of Magnesium Oxide Thin Film by Spectroscopic Ellipsometry

Not Accessible

Your library or personal account may give you access

Abstract

One of the major problems that has been plaguing the optical and materials engineers in the effective utilization of thin films in a variety of optical devices, is that even the basic data on the true refractive index, and its dispersion of many materials have not yet been determined since they are not available in bulk form and in thin film form they are inhomogeneous with consequent irreproducible results. Borgogno et al. [1] have recently developed a method of determining the complex refractive index, the thickness and the magnitude of film inhomogeneity from an analysis of normal incidence spectral reflectance and transmittance results with the assumption that the refractive index of the film decreases (or increases) linearly with thickness due to inhomogeneity. Such an assumption is however seldom valid.

© 1988 Optical Society of America

PDF Article
More Like This
Spectroellipsometry of thin films

K. VEDAM and S. Y. KIM
WD3 Conference on Lasers and Electro-Optics (CLEO:S&I) 1988

Nondestructive depth profiling of transparent thin films by spectroscopic ellipsometry

K. Vedam, L. D’aries, and A. H. Guenther
TUC5 OSA Annual Meeting (FIO) 1986

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.