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Effect of Ion-Assisted Deposition on the Crystallinity of Samarium Fluoride Films

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Abstract

Crystalline structure is known to be a very important factor in coating performance. This was shown most recently in fluorides by work on MgF21,2 and on LaF33,4. This paper examines the influence of ion-assisted deposition (IAD) and deposition temperature on single layer coatings of SmF3. The samarium cation is both divalent and trivalent and the trifluoride has two possible crystalline structures: hexagonal and orthorhombic. As a result, the two variations on deposition technique produce films of very different crystal structures and orientations.

© 1988 Optical Society of America

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