Multilayer and Variable Index Coating Deposition by Automatic Ellipsometry

B. Tirri; D. Dunn; P. Vanbuskirk

doi:10.1364/OIC.1988.TuD2

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper TuD2
•https://doi.org/10.1364/OIC.1988.TuD2

Multilayer and Variable Index Coating Deposition by Automatic Ellipsometry

B. Tirri, D. Dunn, and P. Vanbuskirk

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
ISBN:

From the session
Monitoring (TuD)

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B. Tirri, D. Dunn, and P. Vanbuskirk, "Multilayer and Variable Index Coating Deposition by Automatic Ellipsometry," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper TuD2.

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Abstract

Automatic ellipsometry is very useful as a monitoring instrument due to its accuracy and precision. Application to several classes of thin film designs of this approach will be described.

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