Indices and Thicknesses Determination of Thin Optical Multilayer Coatings by Spectroscopic Ellipsometry

W. Neumann; W. Neumann; J.Ph. Piel; J.L. Stehle

doi:10.1364/OIC.1992.OThE2

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1992),
paper OThE2
•https://doi.org/10.1364/OIC.1992.OThE2

Indices and Thicknesses Determination of Thin Optical Multilayer Coatings by Spectroscopic Ellipsometry

W. Neumann, J.Ph. Piel, and J.L. Stehle

Optical Interference Coatings 1992

Tucson, Arizona United States
1–5 June 1992
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Ellipsometry (OThE)

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W. Neumann, J. P. Piel, and J. L. Stehle, "Indices and Thicknesses Determination of Thin Optical Multilayer Coatings by Spectroscopic Ellipsometry," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1992), paper OThE2.

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Abstract

Thin optical multilayer coatings, digital mirrors, have been measured by visible spectroscopic ellipsometry. Data reduction and limitations of results of this technics will be analyzed.

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