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Spectroscopic Ellipsometric Characterization of TiO2/Ag/TiO2 Optical Coatings

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Optical constants (3000-800Å) and layer thicknesses in a three-layer glass/TiO2/Ag/TiO2 structure were determined using variable angle of incidence spectroscopic ellipsometry (VASE). Spectral characteristics due to plasmon effects were observed in n and k spectra for the thin silver layers.

© 1988 Optical Society of America

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