Characterization of Electron-beam Deposited TiO2/SiO2 Coatings Based on Multi-Sample Photometric and Ellipsometric Data

Tatiana Amochkina; Michael Trubetskov; Michael Trubetskov; Vesna Janicki; Jordi Sancho Parramon

doi:10.1364/OIC.2022.ThA.5

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ThA.5
•https://doi.org/10.1364/OIC.2022.ThA.5

Characterization of Electron-beam Deposited TiO2/SiO2 Coatings Based on Multi-Sample Photometric and Ellipsometric Data

Tatiana Amochkina, Michael Trubetskov, Vesna Janicki, and Jordi Sancho Parramon

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Characterization I: Optical and Mechanical Properties of Nanostructures and Coatings (ThA)

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T. Amochkina, M. Trubetskov, V. Janicki, and J. S. Parramon, "Characterization of Electron-beam Deposited TiO2/SiO2 Coatings Based on Multi-Sample Photometric and Ellipsometric Data," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper ThA.5.

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Abstract

A post-production characterization approach based on spectral photometric and ellipsometric data related to a specially developed set of samples is proposed. Reliability of the approach is demonstrated.

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