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Conferences > OIC > 1992 > OThE > OThE8

Characterization of Inhomogeneous and Absorbing Thin Films by Combined Spectroscopic Ellipsometry/ Reflection, and Transmission Measurements

Blaine Johs, D. Meyer, John A. Woollam, J.F. Elman, T.E. Long, and J.T. Koberstein

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Abstract

Optical constants and film structure of inhomogeneous and absorbing thin films are characterized by a combined analysis of spectroscopic ellipsometry, transmission and reflection data.

© 1992 Optical Society of America

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