UV Laser Coatings at 193 nm - 355 nm

Xiu Fen Wang; Hong Zhang; Weizhen Qian

doi:10.1364/OIC.1992.OTuA2

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1992),
paper OTuA2
•https://doi.org/10.1364/OIC.1992.OTuA2

UV Laser Coatings at 193 nm - 355 nm

Xiu Fen Wang, Hong Zhang, and Weizhen Qian

Optical Interference Coatings 1992

Tucson, Arizona United States
1–5 June 1992
ISBN:

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Applications 1 (OTuA)

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X. F. Wang, H. Zhang, and W. Qian, "UV Laser Coatings at 193 nm - 355 nm," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1992), paper OTuA2.

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Abstract

Interest in UV optical coating has increased in recent years, due to applications in excimer lasers and lithography. Aluminium mirrors coved MgF coatings are tranditional UV reflection optics. The mirrors with reflectance of 80-85% have been used in many applications.

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