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Surface roughness characterisation of Au thin film by Spectroscopic Ellipsometry, Grazing x-ray reflectance and Scanning Tunnelling microscopy

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Abstract

Gold thin films of various thicknesses have been evaporated on silicon and aluminium nitride substrates in the same conditions in order to test the substrate influence on the surface roughness and physical properties of the films.

© 1995 Optical Society of America

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