PACVD Deposition of Ultradurable IR Optical Coatings

E M Waddell; D R Gibson; K L Lewis

doi:10.1364/OIC.1995.ThB5

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1995),
paper ThB5
•https://doi.org/10.1364/OIC.1995.ThB5

PACVD Deposition of Ultradurable IR Optical Coatings

E M Waddell, D R Gibson, and K L Lewis

Optical Interference Coatings 1995

Tucson, Arizona United States
5–9 June 1995
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Materials: 2 (ThB)

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E. M. Waddell, D. R. Gibson, and K. L. Lewis, "PACVD Deposition of Ultradurable IR Optical Coatings," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1995), paper ThB5.

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Abstract

Plasma assisted chemical vapour deposition (PACVD) can be used to deposit a range of materials with exceptional mechanical properties. At Pilkington Optronics we have determined that boron phosphide (BP), gallium phosphide (GaP), germanium carbide (GeC) and diamond like carbon (DLC) to be amongst the most useful for IR applications¹.

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