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Interference coatings for the ultraviolet spectral region

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Abstract

Dielectric coatings for high power excimer laser components and other UV applications have been investigated. Objective was the enhancement of reliability and availability of complex UV photon machining and measuring configurations. It has been shown that it is possible to adapt the UV photon beam shape with high efficiency to specific applications by properly designed interference coatings.

© 1995 Optical Society of America

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