Abstract
The quality of optical thin film has a decisive influence on the performance and the appearance of precise optical elements. But there are always some errors in the thickness and the refractive index due to the unstableness of physical condition in vacuum chamber. In this work we used a multi-channel optical monitoring system together with a computer optimization program to make a multi-layer thin film coating. A satisfactory result is obtained.
© 1995 Optical Society of America
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