Abstract

Light scattering from random continuous profiles is rather well understood today and can be predicted with high accuracy¹,². However, for high-quality coatings produced on super smooth substrates (< 0.2 nm roughness), pratically the whole scattering originates from a few localized defects in the stacks. Such discrete irregularities can be detected by the presence of a “ripple” in the angular scattering³ measured with high resolution (0.01°). Therefore the characterization tools must be improved in order to reach the size, refractive index and density of localized defects that still play a key role for many applications⁴ such as laser damage.

© 1995 Optical Society of America