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Conferences > OIC > 1995 > WA > WA8

Multiscale roughness in optical multilayers

C. Deumié, G. Albrand, R. Richier, M. Cathelinaud, and Claude Amra

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Abstract

In the last Tucson meeting, we showed that the macroscopic roughness spectra measured with light scattering at visible wavelengths were perfectly extrapolated at high spatial frequencies by microscopic roughness spectra measured with Atomic Force Microscopy1. These results have been largely confirmed by numerous experiments2,3 and allow us today to characterize thin films microstructure from a macroscopic to a microscopic scale.

© 1995 Optical Society of America

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