Abstract

Electrochromic properties of transition metal oxides have been extensively studied in recent years due to their potential application as " smart " optical-switching window materials.^1,2,3,4 In particular, tungsten oxide outperforms most of other transition metal oxide films and thus draws most attention from researchers.⁵ Tungsten oxide film can be prepared by many methods, including electron-beam evaporation, thermal vacuum evaporation,² chemical vapor deposition, sol-gel deposition, and sputter deposition. Among these methods reactive sputtering is most suitable for large area applications such as automobile glass and architecture building glass.

© 1998 Optical Society of America