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Conferences > OIC > 2004 > ThD > ThD4

Fabrication of Fabry-Pérot filters using porous-dense silicon nitride stacks with optimized interfaces

Richard Vernhes, Aram Amassian, Jolanta E. Klemberg-Sapieha, and Ludvik Martinu

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Abstract

We fabricated Fabry-Pérot filters using PECVD of porous and dense silicon nitride multilayers. The surface of porous layers was systematically treated by ion bombardement in order to control the properties of interfaces and enhance the filter performance.

© 2004 Optical Society of America

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