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Correlation of Optical Properties and Laser Damage Resistance for Ion Beam Sputtered Al2O3/AlF3 and Al2O3/SiO2 Mixture Coatings

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Oxifluoride and oxide mixture thin films with different ratios are produced by ion beam sputtering. The optical properties and the composition of Al2O3/AlF3 and Al2O3/SiO2 mixture coatings are correlated with the femtosecond laser damage resistance.

© 2013 Optical Society of America

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