Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2022 > TB > TB.7

Finite Element Method Analyzes the Residual Stress of HfO2/SiO2 Multi-Layer on Flexible Substrate Evaporated with Ion-beam Assisted Deposition

Hsi-Chao Chen, Xin-Ya Zheng, Sheng-Bin Chen, Ming-Ying Wu, and Szu-Hui Lee

Not Accessible

Your library or personal account may give you access

Abstract

The four-layer anti-reflection films of HfO2/SiO2 was prepared on flexible substrate by E-gun evaporation with ion-beam assisted deposition. Finite element method combined the shell theory to investigate the residual stress.

© 2022 The Author(s)

PDF Article
More Like This
Investigation of stress mechanism of SiO2 and Nb2O5 thin films sputtered on flexible substrate with finite element method

Hsi-Chao Chen, Chen-Yu Huang, and Po-Wei Cheng
WE.4 Optical Interference Coatings (OIC) 2016

Investigation of the Anisotropic Stress of the Anti-reflector Multilayer Film Deposited on PET Flexible Substrate

Hsi-Chao Chen, Chun-Hao Chang, Yu-Ru Lu, Sheng-Bin Chen, Cheng-Xuan Wu, and Ching-Chieh Hung
WC.9 Optical Interference Coatings (OIC) 2019

Study of Amorphous Dielectric Optical Coatings Deposited by Plasma Ion Assisted Electron Beam Evaporation for Gravitational Wave Detectors

Carlos Garcia Nuñez, Gavin Wallace, Lewis Fleming, Kieran Craig, Shigeng Song, Sam Ahmadzadeh, Caspar Clark, Simon Tait, Iain Martin, Stuart Reid, Sheila Rowan, and Des Gibson
WB.4 Optical Interference Coatings (OIC) 2022

View More...

Poster Presentation

Media 1: PDF (649 KB)     
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use