Abstract
We report on the effects of annealing on the residual film stress in titania germania mixtures grown by ion beam sputter deposition. Understanding stress during processing is critical in designing robust multilayer coatings.
© 2022 The Author(s)
PDF Article | Presentation VideoMore Like This
Chien-Jen Tang, Cheng-Chung Jaing, Kun-Hsien Lee, and Cheng-Chung Lee
WD8 Optical Interference Coatings (OIC) 2010
Roger P. Netterfield and Mark Gross
ThD2 Optical Interference Coatings (OIC) 2007
Hsi-Chao Chen and Chen-Yu Huang
WD10 Optical Interference Coatings (OIC) 2010