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Effects of Annealing on Residual Stress in Titania Germania Mixtures Deposited by Ion Beam Sputtering

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Abstract

We report on the effects of annealing on the residual film stress in titania germania mixtures grown by ion beam sputter deposition. Understanding stress during processing is critical in designing robust multilayer coatings.

© 2022 The Author(s)

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More Like This
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