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Development of HfO2 PEALD Thin Films for the Conformal Coating of High Power Laser Optics

A. Szeghalmi, V. Beladiya, S. Alam, S. Schröder, and S. Riese

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Abstract

Here, we discuss the development of HfO2 PEALD thin films for laser applications. Antireflection coatings and dielectric mirrors for 355, 532 and 1064 nm wavelength and their laser damage resistance are presented.

© 2022 The Author(s)

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