Conformal Anti-Reflective Coatings on 3D DUV Optics

Ming-Huang Huang; Hoon Kim; Chang-gyu Kim; Soo-ho Park; Jue Wang

doi:10.1364/OIC.2022.ME.3

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ME.3
•https://doi.org/10.1364/OIC.2022.ME.3

Conformal Anti-Reflective Coatings on 3D DUV Optics

Ming-Huang Huang, Hoon Kim, Chang-gyu Kim, Soo-ho Park, and Jue Wang

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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M. Huang, H. Kim, C. Kim, S. Park, and J. Wang, "Conformal Anti-Reflective Coatings on 3D DUV Optics," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper ME.3.

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Abstract

Conformal AR coatings for DUV optics were performed via atomic layer deposition. 6-layer AR using Al₂O₃/SiO₂ and 4-layer using HfO₂/SiO₂ were demonstrated with a high transmittance > 99% and a low reflectance at 266 nm.

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