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Conferences > OIC > 2022 > TD > TD.10

Influence of Co-content on optical and structural properties of amorphous (T,Co)Ox thin-film coatings

Patrycja Pokora, Damian Wojcieszak, Malwina Sikora, Szymon Kiełczawa, and Paweł Chodasewicz

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Abstract

Non-stoichiometric (Ti,Co)Ox coatings were prepared by gas impulse magnetron sputtering. Impulse ignited Ar:O2 plasma with low oxygen content (6%) resulted in amorphous and semiconducting coatings which transparency dependent from Co-content.

© 2022 The Author(s)

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